Cleanroom Equipment

Our cleanroom provides photolithography, PDMS work, metal deposition, and wet- and dry-etching.

This laboratory is supported by the W.M. Keck Foundation and QB3.

Spinner, hot plates & ultrasonicator
Basic cleaning, coating, and baking of samples

Reactive Ion Etcher
Dry etching of samples:  CH₄, SF₆, O₂ & Ar available

Acid and solvent wet benches
Wet etching and development/removal of resist

Electron beam evaporator
Deposition of metals and insulators on samples

Oxygen plasma cleaner
Cleaning of samples and PDMS bonding for soft lithography

Inspection microscope
High resolution optical inspection of samples

Mask Aligner
Alignment and exposure of photoresist coated samples

Ultraclean Oven
Highly controlled baking and curing of samples