Cleanroom Equipment

Our cleanroom provides photolithography, PDMS work, metal deposition, and wet- and dry-etching.

This laboratory is supported by the W.M. Keck Foundation and QB3.

Spinner   Reactive Ion Etecher

Spinner, hot plates & ultrasonicator
Basic cleaning, coating, and baking of samples

 

Reactive Ion Etcher
Dry etching of samples:  CH4, SF6, O2 & Ar available

 
Solvent Wet Benches   Ebeam Evaporator

Acid and solvent wet benches
Wet etching and development/removal of resist

 

Electron beam evaporator
Deposition of metals and insulators on samples

 
Oxygen Plasma Cleaner   Inspection Microscope

Oxygen plasma cleaner
Cleaning of samples and PDMS bonding for soft lithography

 

Inspection microscope
High resolution optical inspection of samples

 
Mask Aligner   Ultraclean Oven

Mask Aligner
Alignment and exposure of photoresist coated samples

 

Ultraclean Oven
Highly controlled baking and curing of samples