Our cleanroom provides photolithography, PDMS work, metal deposition, and wet- and dry-etching. This laboratory is supported by the W.M. Keck Foundation and QB3. |
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Spinner, hot plates & ultrasonicator |
Reactive Ion Etcher |
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Acid and solvent wet benches |
Electron beam evaporator |
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Oxygen plasma cleaner |
Inspection microscope |
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Mask Aligner |
Ultraclean Oven |